Semitron® MPR1000

Semitron® MPR1000 is a new engineering material developed for Semiconductor applications and more specifically for use in vacuum chamber applications such as these found in Etch, CVD and Ion Implant.

Product Overview.

• Excellent heat resistance
• Low ionic content & low out-gassing
• Low rate of erosion in plasma chambers
• Excellent chip resistance, durability and machinability
• Lowest cost plastic solution that also provides the highest level of performance in the chamber

Product Details

The material was developed based on three key premises:
1. Longevity - Increased life in plasma chambers over traditional plastics such as polyimide (up to 25X over polyimide in ozone)
2. Clean - Low ionic metal content and low out-gassing
3. Value - Lower overall cost in use compared to traditional materials used in vacuum chamber applications such as quartz, ceramics, and engineering plastics

Applications.

• Ideally used in plasma based vacuum chambers
• Typically used in clamp rings, trench rings, screws, pins, and shower heads
• Centering pins, focus rings, insulators, vacuum pads, and wafer guides