Semitron® CMP LL5

The Semitron® CMP product line was developed to give new tool designers and forward-thinking end users an opportunity to increase the number of devices successfully produced per wafer while decreasing the cost of consumables per device.  This is achieved by increasing the service life of the retaining ring.

Product Overview.

• Semitron® CMP LL5 is one of the next-generation materials developed to significantly increase the performance possible from CMP tools. It is white in color and opaque.

   

  • Long life material - up to 5x PPS
  • Ideal for CMP applications up to 140°F (60°C)
  • Best performance in oxide chemistries - up to 8x PPS